11/26/2010	4:33:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/26/2010	4:33:27 PM	Recipe started at 4:33 PM
11/26/2010	4:33:27 PM	H2 valve closed
11/26/2010	4:33:27 PM	BCl3 valve closed
11/26/2010	4:33:27 PM	PH3 valve closed
11/26/2010	4:33:27 PM	SiCl4 pre valve closed
11/26/2010	4:33:27 PM	SiCl4 post valve closed
11/26/2010	4:33:27 PM	Main Vac valve closed
11/26/2010	4:33:27 PM	Bypass valve closed
11/26/2010	4:33:27 PM	Bubbler valve closed
11/26/2010	4:33:27 PM	Helium valve opened
11/26/2010	4:33:27 PM	Helium MFC set to  500.000000
11/26/2010	4:33:27 PM	H2 MFC set to  0.000000
11/26/2010	4:33:27 PM	BCl3 MFC set to  0.000000
11/26/2010	4:33:27 PM	PHl3 MFC set to  0.000000
11/26/2010	4:33:27 PM	SiCl4 MFC set to  0.000000
11/26/2010	4:33:27 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	4:33:28 PM	Tube furnace set to 0
11/26/2010	4:34:48 PM	Helium valve closed
11/26/2010	4:34:48 PM	H2 valve closed
11/26/2010	4:34:48 PM	BCl3 valve closed
11/26/2010	4:34:48 PM	PH3 valve closed
11/26/2010	4:34:48 PM	SiCl4 pre valve closed
11/26/2010	4:34:48 PM	SiCl4 post valve closed
11/26/2010	4:34:48 PM	Main Vac valve closed
11/26/2010	4:34:48 PM	Bypass valve closed
11/26/2010	4:34:48 PM	Bubbler valve closed
11/26/2010	4:34:48 PM	Helium MFC set to  0.000000
11/26/2010	4:34:48 PM	H2 MFC set to  0.000000
11/26/2010	4:34:48 PM	BCl3 MFC set to  0.000000
11/26/2010	4:34:48 PM	PHl3 MFC set to  0.000000
11/26/2010	4:34:48 PM	SiCl4 MFC set to  0.000000
11/26/2010	4:34:48 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	4:34:48 PM	Tube furnace set to 0
11/26/2010	4:34:48 PM	Run finished at 4:34 PM
11/26/2010	4:34:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/26/2010	4:37:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/26/2010	4:37:40 PM	Recipe started at 4:37 PM
11/26/2010	4:37:40 PM	H2 valve closed
11/26/2010	4:37:40 PM	BCl3 valve closed
11/26/2010	4:37:40 PM	PH3 valve closed
11/26/2010	4:37:40 PM	SiCl4 pre valve closed
11/26/2010	4:37:40 PM	SiCl4 post valve closed
11/26/2010	4:37:40 PM	Main Vac valve closed
11/26/2010	4:37:40 PM	Bypass valve closed
11/26/2010	4:37:40 PM	Bubbler valve closed
11/26/2010	4:37:40 PM	Helium valve opened
11/26/2010	4:37:40 PM	Helium MFC set to  500.000000
11/26/2010	4:37:40 PM	H2 MFC set to  0.000000
11/26/2010	4:37:40 PM	BCl3 MFC set to  0.000000
11/26/2010	4:37:40 PM	PHl3 MFC set to  0.000000
11/26/2010	4:37:40 PM	SiCl4 MFC set to  0.000000
11/26/2010	4:37:40 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	4:37:40 PM	Tube furnace set to 0
11/26/2010	4:37:41 PM	Helium valve closed
11/26/2010	4:37:41 PM	H2 valve closed
11/26/2010	4:37:41 PM	BCl3 valve closed
11/26/2010	4:37:41 PM	PH3 valve closed
11/26/2010	4:37:41 PM	SiCl4 pre valve closed
11/26/2010	4:37:41 PM	SiCl4 post valve closed
11/26/2010	4:37:41 PM	Main Vac valve closed
11/26/2010	4:37:41 PM	Bypass valve closed
11/26/2010	4:37:41 PM	Bubbler valve closed
11/26/2010	4:37:41 PM	Helium MFC set to  0.000000
11/26/2010	4:37:41 PM	H2 MFC set to  0.000000
11/26/2010	4:37:41 PM	BCl3 MFC set to  0.000000
11/26/2010	4:37:41 PM	PHl3 MFC set to  0.000000
11/26/2010	4:37:41 PM	SiCl4 MFC set to  0.000000
11/26/2010	4:37:41 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	4:37:41 PM	Tube furnace set to 0
11/26/2010	4:37:41 PM	Run finished at 4:37 PM
11/26/2010	4:37:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/26/2010	4:42:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/26/2010	4:42:42 PM	Recipe started at 4:42 PM
11/26/2010	4:42:42 PM	Helium valve closed
11/26/2010	4:42:42 PM	H2 valve closed
11/26/2010	4:42:42 PM	BCl3 valve closed
11/26/2010	4:42:42 PM	PH3 valve closed
11/26/2010	4:42:42 PM	SiCl4 pre valve closed
11/26/2010	4:42:42 PM	SiCl4 post valve closed
11/26/2010	4:42:42 PM	Main Vac valve closed
11/26/2010	4:42:42 PM	Bubbler valve closed
11/26/2010	4:42:42 PM	Bypass valve opened
11/26/2010	4:42:42 PM	Helium MFC set to  0.000000
11/26/2010	4:42:42 PM	H2 MFC set to  0.000000
11/26/2010	4:42:42 PM	BCl3 MFC set to  0.000000
11/26/2010	4:42:42 PM	PHl3 MFC set to  0.000000
11/26/2010	4:42:42 PM	SiCl4 MFC set to  0.000000
11/26/2010	4:42:42 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	4:42:42 PM	Tube furnace set to 0
11/26/2010	4:43:34 PM	Helium valve closed
11/26/2010	4:43:34 PM	H2 valve closed
11/26/2010	4:43:34 PM	BCl3 valve closed
11/26/2010	4:43:34 PM	PH3 valve closed
11/26/2010	4:43:34 PM	SiCl4 pre valve closed
11/26/2010	4:43:34 PM	SiCl4 post valve closed
11/26/2010	4:43:34 PM	Bubbler valve closed
11/26/2010	4:43:34 PM	Main Vac valve opened
11/26/2010	4:43:34 PM	Bypass valve opened
11/26/2010	4:43:34 PM	Helium MFC set to  0.000000
11/26/2010	4:43:34 PM	H2 MFC set to  0.000000
11/26/2010	4:43:34 PM	BCl3 MFC set to  0.000000
11/26/2010	4:43:34 PM	PHl3 MFC set to  0.000000
11/26/2010	4:43:34 PM	SiCl4 MFC set to  0.000000
11/26/2010	4:43:34 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	4:43:35 PM	Tube furnace set to 0
11/26/2010	4:43:35 PM	Run finished at 4:43 PM
11/26/2010	4:43:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/26/2010	4:47:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/26/2010	4:47:46 PM	Recipe started at 4:47 PM
11/26/2010	4:47:46 PM	H2 valve closed
11/26/2010	4:47:46 PM	BCl3 valve closed
11/26/2010	4:47:46 PM	PH3 valve closed
11/26/2010	4:47:46 PM	SiCl4 pre valve closed
11/26/2010	4:47:46 PM	SiCl4 post valve closed
11/26/2010	4:47:46 PM	Main Vac valve closed
11/26/2010	4:47:46 PM	Bypass valve closed
11/26/2010	4:47:46 PM	Bubbler valve closed
11/26/2010	4:47:46 PM	Helium valve opened
11/26/2010	4:47:46 PM	Helium MFC set to  500.000000
11/26/2010	4:47:46 PM	H2 MFC set to  0.000000
11/26/2010	4:47:46 PM	BCl3 MFC set to  0.000000
11/26/2010	4:47:46 PM	PHl3 MFC set to  0.000000
11/26/2010	4:47:46 PM	SiCl4 MFC set to  0.000000
11/26/2010	4:47:46 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	4:47:46 PM	Tube furnace set to 0
11/26/2010	4:49:06 PM	Helium valve closed
11/26/2010	4:49:06 PM	H2 valve closed
11/26/2010	4:49:06 PM	BCl3 valve closed
11/26/2010	4:49:06 PM	PH3 valve closed
11/26/2010	4:49:06 PM	SiCl4 pre valve closed
11/26/2010	4:49:06 PM	SiCl4 post valve closed
11/26/2010	4:49:06 PM	Main Vac valve closed
11/26/2010	4:49:06 PM	Bypass valve closed
11/26/2010	4:49:06 PM	Bubbler valve closed
11/26/2010	4:49:06 PM	Helium MFC set to  0.000000
11/26/2010	4:49:06 PM	H2 MFC set to  0.000000
11/26/2010	4:49:06 PM	BCl3 MFC set to  0.000000
11/26/2010	4:49:06 PM	PHl3 MFC set to  0.000000
11/26/2010	4:49:06 PM	SiCl4 MFC set to  0.000000
11/26/2010	4:49:06 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	4:49:06 PM	Tube furnace set to 0
11/26/2010	4:49:06 PM	Run finished at 4:49 PM
11/26/2010	4:49:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/26/2010	4:49:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/26/2010	4:49:09 PM	Recipe started at 4:49 PM
11/26/2010	4:49:09 PM	Helium valve closed
11/26/2010	4:49:10 PM	H2 valve closed
11/26/2010	4:49:10 PM	BCl3 valve closed
11/26/2010	4:49:10 PM	PH3 valve closed
11/26/2010	4:49:10 PM	SiCl4 pre valve closed
11/26/2010	4:49:10 PM	SiCl4 post valve closed
11/26/2010	4:49:10 PM	Main Vac valve closed
11/26/2010	4:49:10 PM	Bubbler valve closed
11/26/2010	4:49:10 PM	Bypass valve opened
11/26/2010	4:49:10 PM	Helium MFC set to  0.000000
11/26/2010	4:49:10 PM	H2 MFC set to  0.000000
11/26/2010	4:49:10 PM	BCl3 MFC set to  0.000000
11/26/2010	4:49:10 PM	PHl3 MFC set to  0.000000
11/26/2010	4:49:10 PM	SiCl4 MFC set to  0.000000
11/26/2010	4:49:10 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	4:49:10 PM	Tube furnace set to 0
11/26/2010	4:49:47 PM	Helium valve closed
11/26/2010	4:49:47 PM	H2 valve closed
11/26/2010	4:49:47 PM	BCl3 valve closed
11/26/2010	4:49:47 PM	PH3 valve closed
11/26/2010	4:49:47 PM	SiCl4 pre valve closed
11/26/2010	4:49:47 PM	SiCl4 post valve closed
11/26/2010	4:49:47 PM	Bubbler valve closed
11/26/2010	4:49:47 PM	Main Vac valve opened
11/26/2010	4:49:47 PM	Bypass valve opened
11/26/2010	4:49:47 PM	Helium MFC set to  0.000000
11/26/2010	4:49:47 PM	H2 MFC set to  0.000000
11/26/2010	4:49:47 PM	BCl3 MFC set to  0.000000
11/26/2010	4:49:47 PM	PHl3 MFC set to  0.000000
11/26/2010	4:49:47 PM	SiCl4 MFC set to  0.000000
11/26/2010	4:49:47 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	4:49:48 PM	Tube furnace set to 0
11/26/2010	4:49:48 PM	Run finished at 4:49 PM
11/26/2010	4:49:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/26/2010	4:50:19 PM	Helium MFC set to  100.000000
11/26/2010	4:50:21 PM	Helium valve opened
11/26/2010	4:54:08 PM	Helium valve closed
11/26/2010	4:54:49 PM	Helium valve opened
11/26/2010	4:56:31 PM	Helium valve closed
11/26/2010	4:56:35 PM	Helium MFC set to  0.000000
11/26/2010	4:57:32 PM	Helium MFC set to  100.000000
11/26/2010	4:57:34 PM	Helium valve opened
11/26/2010	5:00:02 PM	Helium valve closed
11/26/2010	5:00:20 PM	Helium MFC set to  0.000000
11/26/2010	5:00:50 PM	Recipe started at 5:00 PM
11/26/2010	5:00:50 PM	Helium valve closed
11/26/2010	5:00:50 PM	BCl3 valve closed
11/26/2010	5:00:50 PM	PH3 valve closed
11/26/2010	5:00:50 PM	SiCl4 pre valve closed
11/26/2010	5:00:50 PM	SiCl4 post valve closed
11/26/2010	5:00:50 PM	Main Vac valve closed
11/26/2010	5:00:50 PM	Bypass valve closed
11/26/2010	5:00:50 PM	Bubbler valve closed
11/26/2010	5:00:50 PM	H2 valve opened
11/26/2010	5:00:50 PM	Helium MFC set to  0.000000
11/26/2010	5:00:50 PM	H2 MFC set to  500.000000
11/26/2010	5:00:50 PM	BCl3 MFC set to  0.000000
11/26/2010	5:00:50 PM	PHl3 MFC set to  0.000000
11/26/2010	5:00:50 PM	SiCl4 MFC set to  0.000000
11/26/2010	5:00:50 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	5:00:50 PM	Tube furnace set to 1000
11/26/2010	5:02:11 PM	Helium valve closed
11/26/2010	5:02:11 PM	BCl3 valve closed
11/26/2010	5:02:11 PM	PH3 valve closed
11/26/2010	5:02:11 PM	SiCl4 pre valve closed
11/26/2010	5:02:11 PM	SiCl4 post valve closed
11/26/2010	5:02:11 PM	Main Vac valve closed
11/26/2010	5:02:11 PM	Bypass valve closed
11/26/2010	5:02:11 PM	H2 valve opened
11/26/2010	5:02:11 PM	Bubbler valve opened
11/26/2010	5:02:12 PM	Helium MFC set to  0.000000
11/26/2010	5:02:12 PM	H2 MFC set to  500.000000
11/26/2010	5:02:12 PM	BCl3 MFC set to  0.000000
11/26/2010	5:02:12 PM	PHl3 MFC set to  0.000000
11/26/2010	5:02:12 PM	SiCl4 MFC set to  0.000000
11/26/2010	5:02:12 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	5:02:12 PM	Tube furnace set to 1000
11/26/2010	5:22:12 PM	Helium valve closed
11/26/2010	5:22:12 PM	BCl3 valve closed
11/26/2010	5:22:12 PM	PH3 valve closed
11/26/2010	5:22:12 PM	SiCl4 pre valve closed
11/26/2010	5:22:12 PM	SiCl4 post valve closed
11/26/2010	5:22:12 PM	Main Vac valve closed
11/26/2010	5:22:12 PM	Bypass valve closed
11/26/2010	5:22:12 PM	H2 valve opened
11/26/2010	5:22:12 PM	Bubbler valve opened
11/26/2010	5:22:12 PM	Helium MFC set to  0.000000
11/26/2010	5:22:12 PM	H2 MFC set to  500.000000
11/26/2010	5:22:12 PM	BCl3 MFC set to  0.000000
11/26/2010	5:22:12 PM	PHl3 MFC set to  0.000000
11/26/2010	5:22:12 PM	SiCl4 MFC set to  0.000000
11/26/2010	5:22:12 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	5:22:12 PM	Tube furnace set to 750
11/26/2010	5:42:12 PM	H2 valve closed
11/26/2010	5:42:12 PM	BCl3 valve closed
11/26/2010	5:42:12 PM	PH3 valve closed
11/26/2010	5:42:12 PM	SiCl4 pre valve closed
11/26/2010	5:42:12 PM	SiCl4 post valve closed
11/26/2010	5:42:12 PM	Main Vac valve closed
11/26/2010	5:42:12 PM	Bypass valve closed
11/26/2010	5:42:12 PM	Helium valve opened
11/26/2010	5:42:12 PM	Bubbler valve opened
11/26/2010	5:42:12 PM	Helium MFC set to  500.000000
11/26/2010	5:42:12 PM	H2 MFC set to  0.000000
11/26/2010	5:42:12 PM	BCl3 MFC set to  0.000000
11/26/2010	5:42:12 PM	PHl3 MFC set to  0.000000
11/26/2010	5:42:12 PM	SiCl4 MFC set to  0.000000
11/26/2010	5:42:12 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	5:42:12 PM	Tube furnace set to 0
11/26/2010	5:48:38 PM	Run aborted at 5:48 PM
11/26/2010	5:48:38 PM	Helium valve closed
11/26/2010	5:48:38 PM	H2 valve closed
11/26/2010	5:48:38 PM	BCl3 valve closed
11/26/2010	5:48:38 PM	PH3 valve closed
11/26/2010	5:48:38 PM	SiCl4 pre valve closed
11/26/2010	5:48:38 PM	SiCl4 post valve closed
11/26/2010	5:48:38 PM	Bypass valve closed
11/26/2010	5:48:38 PM	Main Vac valve closed
11/26/2010	5:48:38 PM	Bubbler valve closed
11/26/2010	5:48:38 PM	Helium MFC set to  0.000000
11/26/2010	5:48:38 PM	H2 MFC set to  0.000000
11/26/2010	5:48:38 PM	BCl3 MFC set to  0.000000
11/26/2010	5:48:38 PM	PHl3 MFC set to  0.000000
11/26/2010	5:48:38 PM	SiCl4 MFC set to  0.000000
11/26/2010	5:48:39 PM	Tube furnace set to 0
11/26/2010	5:48:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/26/2010	5:48:42 PM	Recipe started at 5:48 PM
11/26/2010	5:48:42 PM	H2 valve closed
11/26/2010	5:48:42 PM	BCl3 valve closed
11/26/2010	5:48:42 PM	PH3 valve closed
11/26/2010	5:48:42 PM	SiCl4 pre valve closed
11/26/2010	5:48:42 PM	SiCl4 post valve closed
11/26/2010	5:48:42 PM	Main Vac valve closed
11/26/2010	5:48:42 PM	Bypass valve closed
11/26/2010	5:48:42 PM	Bubbler valve closed
11/26/2010	5:48:42 PM	Helium valve opened
11/26/2010	5:48:42 PM	Helium MFC set to  500.000000
11/26/2010	5:48:42 PM	H2 MFC set to  0.000000
11/26/2010	5:48:42 PM	BCl3 MFC set to  0.000000
11/26/2010	5:48:42 PM	PHl3 MFC set to  0.000000
11/26/2010	5:48:42 PM	SiCl4 MFC set to  0.000000
11/26/2010	5:48:42 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	5:48:42 PM	Tube furnace set to 0
11/26/2010	5:48:42 PM	Helium valve closed
11/26/2010	5:48:42 PM	H2 valve closed
11/26/2010	5:48:42 PM	BCl3 valve closed
11/26/2010	5:48:42 PM	PH3 valve closed
11/26/2010	5:48:42 PM	SiCl4 pre valve closed
11/26/2010	5:48:42 PM	SiCl4 post valve closed
11/26/2010	5:48:42 PM	Main Vac valve closed
11/26/2010	5:48:42 PM	Bypass valve closed
11/26/2010	5:48:42 PM	Bubbler valve closed
11/26/2010	5:48:42 PM	Helium MFC set to  0.000000
11/26/2010	5:48:42 PM	H2 MFC set to  0.000000
11/26/2010	5:48:42 PM	BCl3 MFC set to  0.000000
11/26/2010	5:48:42 PM	PHl3 MFC set to  0.000000
11/26/2010	5:48:42 PM	SiCl4 MFC set to  0.000000
11/26/2010	5:48:42 PM	Bypass solenoid MFC set to  0.000000
11/26/2010	5:48:42 PM	Tube furnace set to 0
11/26/2010	5:48:42 PM	Run finished at 5:48 PM
11/26/2010	5:48:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
